 Yuen Kuan Yong  Tien-Fu Lu
Modelling of Compliant Micro-motion Stages with Flexure Hinges
Yuen Kuan Yong and Tien-Fu Lu
Keywords: Micro-motion stage, compliant Mechanism, flexure Hinge
(Commenced: 31-Jan-2003,Concluded: 31-Jan-2008)
This research project focuses on the methodology of deriving simple but effective kinematic and static models of compliant micro-motion stages which accurately represent the real system. The models will benefit the design and optimisation processes where a few micro-motion stage designs can be analysed quickly without the needs of using any commercially available finite-element software. A 3-DOF micro-motion stage, which is designed for the positioning of samples in a Scanning-Electron-Microscope (SEM), is selected as an example to develop this methodology.
Publications
- Yong, Y. K., Lu, T.-F. and Handley, D. C., Review of circular flexure hinge design equations and derivation of empirical formulations, Precision Engineering, 32(2): 63-70, 2008.
- Yong, Y. K. and Lu, T.-F., The effect of the accuracies of flexure hinge equations on the output compliances of planar micro-motion stages, Mechanism and Machine Theory, 43(3): 347-363, 2008.
- Handley, D. C., Lu, T.-F. and Yong, Y. K., A simple and efficient modelling method for planar flexure hinge compliant mechanisms, Precision Engineering, (Accepted 15 May 2007).
- Yong, Y. K., Lu, T.-F. and Minase, J. L., Trajectory following with a three-DOF micro-motion stage, Australasian Conference on Robotics and Automation, ACRA, Dec. 6-8, Auckland, New Zealand (2006).
- Yong, Y. K., Lu, T.-F, Handley, D. C. and Hu, P., A study on the accuracy of kinematic modelling for a 3RRR compliant micro-motion stage with flexure hinges, Journal of the Chinese Society of Mechanical Engineers, 25 (5): 457-464, 2004.
- Lu, T.-F, Handley, D. C., Yong, Y. K. and Eales, C., A three-DOF compliant micromotion stage with flexure hinges, An International Journal of Industrial Robot, 31(4): 355-361, 2004.
- Lu, T.-F, Handley, D. C. and Yong, Y. K., Position control of a 3DOF compliant micro-motion stage, The Eighth International Conference on Control, Automation, Robotics and Vision, ICARCV 2004, Kunming, China, pp. 1274-1278, (2004).
- Handley, D. C., Lu, T.-F and Yong, Y. K., Workspace investigation of a 3DOF compliant micro-motion stage, The Eighth International Conference on Control, Automation, Robotics and Vision, ICARCV 2004, Kunming, China, pp. 1279-1284 (2004).
- Handley, D. C., Lu, T.-F, Yong, Y. K. and Zhang, W. J., A simple and efficient dynamic modeling method for compliant micropositioning mechanisms using flexure hinges, Proceedings of SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, 5276, pp. 67-76 (2003).
- Yong, Y. K., Lu, T.-F. and Handley, D. C., Loop-closure theory in deriving linear and simple kinematic model for a 3 DOF parallel micromanipulator, Proceedings of SPIE on Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, Australia, 5276, pp. 57-66 (2003).
Link
Image Galleries:- 3-DOF compliant micro-motion stages (6 Images)
This collection of images show two different prototypes of 3-DOF compliant micro-motion stages. The first prototype is used for the manipulation of biological cell during the IVF process. The second prototype is designed for the positioning of samples in a Scanning-Electron-Microscope (SEM).
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