Mechanical Engineering The University of Adelaide Australia
Position Control of a 3 DOF Compliant Micro-Motion Stage Publications in 2004
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Daniel Handley

Tien-Fu Lu

Yuen Kuan Yong

Craig Eales

Workspace Investigation of a 3 DOF Compliant Micro-motion Stage

Daniel Handley, Tien-Fu Lu, Yuen Kuan Yong and Craig Eales

Submitted as a Conference Paper


This paper investigates the workspace of a three degree-of-freedom (DOF) compliant micro-motion stage with flexure hinges. This micro-motion stage has parallel structure for better stiffness and accuracy than serial structures and is driven by three PZT stack actuators. This kind of micro-motion stage can be used in applications including micro system assembly, biological cell manipulation and microsurgery. Nevertheless, workspace is fundamental. When selecting or designing micro-motion stage(s) for a particular application, its workspace must be studied to ensure the end-effector can reach the desired points with required orientations. In this paper the workspace of the presented micro-motion stage is investigated and presented, both mathematically and empirically.

(Published:06-Dec-2004)


Bibtek Entry:


@InProceedings{AUMECH_robotics47,
author = \{Daniel Handley and Tien-Fu Lu and Yuen Kuan Yong and Craig Eales},
title = {Workspace Investigation of a 3 DOF Compliant Micro-motion Stage},
booktitle = {***???},
pages = {1279-1284}
year = {2004},
editor = {***???},
volume = {},
number = {},
series = {***???},
address = {***???},,
month = {December} ,
organization = {***???},
publisher = {***???}